Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

Christian Saringer, Robert Franz, Katrin Zorn, Christian Mitterer

Research output: Contribution to conference › Poster › Research

Original language	English
Publication status	Published - 14 Sept 2016
Event	15th International Conference on Plasma Surface Engineering - Kongresshaus, Garmisch-Partenkirchen, Germany Duration: 12 Sept 2016 → 16 Sept 2016

Conference	15th International Conference on Plasma Surface Engineering
Abbreviated title	PSE 2016
Country/Territory	Germany
City	Garmisch-Partenkirchen
Period	12/09/16 → 16/09/16

15th International Conference on Plasma Surface Engineering
Christian Saringer (Participant)
11 Sept 2016 → 16 Sept 2016
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{f5d93ffa95f84e45b8ffa16f1f2e958a,

title = "Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power",

author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",

year = "2016",

month = sep,

day = "14",

language = "English",

note = "15th International Conference on Plasma Surface Engineering ; Conference date: 12-09-2016 Through 16-09-2016",

}

TY - CONF

T1 - Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

AU - Saringer, Christian

AU - Franz, Robert

AU - Zorn, Katrin

AU - Mitterer, Christian

PY - 2016/9/14

Y1 - 2016/9/14

M3 - Poster

T2 - 15th International Conference on Plasma Surface Engineering

Y2 - 12 September 2016 through 16 September 2016

ER -