Combinatorial refinement of thin-film microstructure, properties and process conditions: Iterative nanoscale search for self-assembled TiAlN nanolamellae

J. Zalesak, J. Todt, R. Pitonak, A. Köpf, R. Weißenbacher, B. Sartory, M. Burghammer, R. Daniel, J. Keckes

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