CO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings

Christoph Czettl, Christian Mitterer, U. Mühle, D Rafaja, S Puchner, H. Hutter, M. Penoy, C. Michotte, M. Kathrein

Research output: Contribution to journalArticleResearchpeer-review

24 Citations (Scopus)
Translated title of the contributionCO addition in low-pressure chemical vapour deposition of medium-temperature TiCxN1-x based hard coatings
Original languageEnglish
Pages (from-to)1691-1697
JournalSurface & coatings technology
Volume206
DOIs
Publication statusPublished - 2011

Cite this