Chemistry and microstructure of PLD (Ti,Al)CxN1-x coatings deposited at room temperature

Juergen Lackner, Wolfgang Waldhauser, Reinhold Ebner, Ronald Bakker

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13 Citations (Scopus)

Translated title of the contribution	Chemistry and microstructure of PLD (Ti,Al)CxN1-x coatings deposited at room temperature
Original language	English
Pages (from-to)	1469-1471
Journal	Applied physics / A (Series A, Materials science & processing)
Volume	79
Publication status	Published - 2004

Cite this

@article{7a1e545d9d8945158007e92a04d5627b,

title = "Chemistry and microstructure of PLD (Ti,Al)CxN1-x coatings deposited at room temperature",

author = "Juergen Lackner and Wolfgang Waldhauser and Reinhold Ebner and Ronald Bakker",

year = "2004",

language = "English",

volume = "79",

pages = "1469--1471",

journal = "Applied physics / A (Series A, Materials science & processing)",

issn = "0340-3793",

publisher = "Springer Berlin",

}

TY - JOUR

T1 - Chemistry and microstructure of PLD (Ti,Al)CxN1-x coatings deposited at room temperature

AU - Lackner, Juergen

AU - Waldhauser, Wolfgang

AU - Ebner, Reinhold

AU - Bakker, Ronald

PY - 2004

Y1 - 2004

M3 - Article

SN - 0340-3793

VL - 79

SP - 1469

EP - 1471

JO - Applied physics / A (Series A, Materials science & processing)

JF - Applied physics / A (Series A, Materials science & processing)

ER -