Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

Roland Lorenz, M. O 'Sullivan, D. Sprenger, Bernhard Lang, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

6 Citations (Scopus)

Original language	English
Pages (from-to)	041504-1 - 041504-6
Journal	Journal of vacuum science & technology / A (JVST)
DOIs	https://doi.org/10.1116/1.4983689
Publication status	Published - 2017

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title = "Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets",

author = "Roland Lorenz and {O 'Sullivan}, M. and D. Sprenger and Bernhard Lang and Christian Mitterer",

year = "2017",

doi = "http://dx.doi.org/10.1116/1.4983689",

language = "English",

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journal = "Journal of vacuum science & technology / A (JVST)",

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publisher = "AVS Science and Technology Society",

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TY - JOUR

T1 - Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

AU - Lorenz, Roland

AU - O 'Sullivan, M.

AU - Sprenger, D.

AU - Lang, Bernhard

AU - Mitterer, Christian

PY - 2017

Y1 - 2017

U2 - http://dx.doi.org/10.1116/1.4983689

DO - http://dx.doi.org/10.1116/1.4983689

M3 - Article

SN - 0734-2101

SP - 041504-1 - 041504-6

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

ER -