Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

Christian Ganser, Gerhard Popovski, Roland Morak, Parvin Sharifi Rajabi, Benedetta Marmiroli, Barbara Sartori, Heinz Amenitsch, Thomas Griesser, Christian Teichert, Oskar Paris

Research output: Contribution to journalArticleResearchpeer-review

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)637
Number of pages644
JournalBeilstein journal of nanotechnology
Volume7
Publication statusPublished - 28 Apr 2016

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