Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings

Gerhard Dehm, Hans-Peter Wörgötter, Sophie Cazottes, Jaya M. Purswani, Daniel Gall, Christian Mitterer, Daniel Kiener

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15 Citations (Scopus)
Translated title of the contributionCan micro-compression testing provide stress-strain data for thin films?: A comparative study using Cu, VN, TiN and W coatings
Original languageEnglish
Pages (from-to)1517-1521
JournalThin solid films
Volume518
DOIs
Publication statusPublished - 2009

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