Atom probe specimen preparation and 3D interfacial study of Ti-Al-N thin films

Richard Rachbauer, S. Massl, Erich Stergar, P. Felfer, Paul Heinz Mayrhofer

Research output: Contribution to journalArticleResearchpeer-review

35 Citations (Scopus)
Translated title of the contributionAtom probe specimen preparation and 3D interfacial study of Ti-Al-N thin films
Original languageEnglish
Pages (from-to)1811-1816
JournalSurface & coatings technology
Volume204
DOIs
Publication statusPublished - 2010

Cite this