Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

Matjaz Panjan, Robert Franz, A. Anders

Research output: Contribution to journal › Article › Research › peer-review

39 Citations (Scopus)

Translated title of the contribution	Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons
Original language	English
Pages (from-to)	0250071-02500712
Journal	Plasma sources science & technology (Plasma Sources Science and technology)
Volume	23
DOIs	https://doi.org/10.1088/0963-0252/23/2/025007
Publication status	Published - 2014

Access to Document

@article{6ed02a61b3e645519b7820655fa59cd5,

title = "Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons",

author = "Matjaz Panjan and Robert Franz and A. Anders",

year = "2014",

doi = "10.1088/0963-0252/23/2/025007",

language = "English",

volume = "23",

pages = "0250071--02500712",

journal = "Plasma sources science & technology (Plasma Sources Science and technology)",

issn = "0963-0252",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

AU - Panjan, Matjaz

AU - Franz, Robert

AU - Anders, A.

PY - 2014

Y1 - 2014

U2 - 10.1088/0963-0252/23/2/025007

DO - 10.1088/0963-0252/23/2/025007

M3 - Article

SN - 0963-0252

VL - 23

SP - 250071

EP - 2500712

JO - Plasma sources science & technology (Plasma Sources Science and technology)

JF - Plasma sources science & technology (Plasma Sources Science and technology)

ER -