Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density

Harald Köstenbauer, Gerardo Fontalvo, Marianne Kapp, Jozef Keckes, Christian Mitterer

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Translated title of the contribution	Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density
Original language	English
Pages (from-to)	4777-4780
Journal	Surface & coatings technology
Volume	201
DOIs	https://doi.org/10.1016/j.surfcoat.2006.10.017
Publication status	Published - 2007

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title = "Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density",

author = "Harald K{\"o}stenbauer and Gerardo Fontalvo and Marianne Kapp and Jozef Keckes and Christian Mitterer",

year = "2007",

doi = "10.1016/j.surfcoat.2006.10.017",

language = "English",

volume = "201",

pages = "4777--4780",

journal = "Surface & coatings technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density

AU - Köstenbauer, Harald

AU - Fontalvo, Gerardo

AU - Kapp, Marianne

AU - Keckes, Jozef

AU - Mitterer, Christian

PY - 2007

Y1 - 2007

U2 - 10.1016/j.surfcoat.2006.10.017

DO - 10.1016/j.surfcoat.2006.10.017

M3 - Article

SN - 0257-8972

VL - 201

SP - 4777

EP - 4780

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -