Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers

Andreas Kleinbichler, Juraj Todt, J. Zechner, S. Wöhlert, Megan Cordill, Daniel Többens

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)376-381
JournalSurface & coatings technology
Volume332
Publication statusPublished - 2017

Cite this