Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating

Stefan Wurster, Stephan Bigl, Megan J. Cordill, Daniel Kiener

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)110-118
Number of pages9
JournalMicroelectronic engineering
Volume167
DOIs
Publication statusPublished - 5 Jan 2017

Keywords

  • Atomic force microscopy
  • Copper metallization
  • Electron backscatter diffraction
  • Laser heating
  • Microstructure
  • Thermo-mechanical fatigue

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