A structural and topographical study of low-pressure chemical-vapor-deposited  polysilicon by scanning probe microscopy

A Pleschinger, Josef Lutz, Friedemar Kuchar

Research output: Contribution to journal › Article › Research › peer-review

4 Citations (Scopus)

Cite this

@article{75b651ab67e447a98654cb41929072a9,

title = "A structural and topographical study of low-pressure chemical-vapor-deposited polysilicon by scanning probe microscopy",

author = "A Pleschinger and Josef Lutz and Friedemar Kuchar",

year = "1997",

language = "English",

volume = "81",

pages = "6749--6754",

journal = "Journal of applied physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

}