A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases

Andreas Schröder, Mario Kupnik, Paul O'Leary, Ewald Benes, Martin Gröschl

Research output: Contribution to journal › Article › Research › peer-review

Translated title of the contribution	A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases
Original language	English
Pages (from-to)	898-905
Journal	IEEE sensors journal
Volume	VOL. 6
Publication status	Published - 2006

Cite this

@article{9b4d576fc1fa4b15bc5609133f7a2944,

title = "A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases",

author = "Andreas Schr{\"o}der and Mario Kupnik and Paul O'Leary and Ewald Benes and Martin Gr{\"o}schl",

year = "2006",

language = "English",

volume = "VOL. 6",

pages = "898--905",

journal = "IEEE sensors journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}