30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered Ti N-SiOx thin film

Jozef Keckes, Rostislav Daniel, Juraj Todt, Jakub Zalesak, Bernhard Sartory, S. Braun, J. Gluch, M. Rosenthal, Manfred C. Burghammer, Christian Mitterer, S. Niese, A. Kubec

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