The sputter performance of an industrial-scale planar Mo-target over ist lifetime:target erosion and film properties

  • Martin Rausch (Speaker)
  • Asaf Sabag (contributor)
  • Karl-Heinz Pichler (contributor)
  • Georg Gruber (contributor)
  • Judith Köstenbauer (contributor)
  • Harald Köstenbauer (contributor)
  • Patrice Kreiml (contributor)
  • Megan J. Cordill (contributor)
  • Jörg Winkler (contributor)
  • Mitterer, C. (contributor)

Activity: Talk or presentation Oral presentation

Period1 May 2019
Event title62nd Annual SVC Technical Conference
Event typeConference
LocationLong Beach, United StatesShow on map