Sputter deposition of Mo-based multicomponent thin films from rotary targets: experiment and simulation
- Martin Rausch (Speaker)
- Márius Pavlovic (contributor)
- Patrice Kreiml (contributor)
- Megan J. Cordill (contributor)
- Jörg Winkler (contributor)
- Mitterer, C. (contributor)
Activity: Talk or presentation › Invited talk