Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films

Titel in Übersetzung: Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films

Nazanin Fateh, Gerardo Fontalvo, Christian Mitterer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

47 Zitate (Scopus)

Titel in Übersetzung	Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films
Originalsprache	Englisch
Seiten (von - bis)	7716-7719
Fachzeitschrift	Journal of physics / D, Applied physics
Jahrgang	40
DOIs	https://doi.org/10.1088/0022-3727/40/24/019
Publikationsstatus	Veröffentlicht - 2007

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title = "Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films",

author = "Nazanin Fateh and Gerardo Fontalvo and Christian Mitterer",

year = "2007",

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T1 - Structural and mechanical properties of dc and pulsed dc reactive magnetron sputtered V2O5 films

AU - Fateh, Nazanin

AU - Fontalvo, Gerardo

AU - Mitterer, Christian

PY - 2007

Y1 - 2007

U2 - 10.1088/0022-3727/40/24/019

DO - 10.1088/0022-3727/40/24/019

M3 - Article

SN - 0022-3727

VL - 40

SP - 7716

EP - 7719

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

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