Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Petr Vita; Doris Prieling; Helfried Steiner; Bernhard Gschaider; Markus Junk; Frank Holsteyns; Felix Staudegger; Christiane Lechner; Hendrik C. Kuhlmann

Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Titel in Übersetzung: Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

Petr Vita, Doris Prieling, Helfried Steiner, Bernhard Gschaider, Markus Junk, Frank Holsteyns, Felix Staudegger, Christiane Lechner, Hendrik C. Kuhlmann

Lehrstuhl für Petroleum and Geothermal Energy Recovery (550)

Publikation: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband

2 Zitate (Scopus)

330 Downloads (Pure)

Titel in Übersetzung	Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers
Originalsprache	Englisch
Titel	MAS 2011 CD-ROM Proceedings
Seiten	149-154
Publikationsstatus	Veröffentlicht - 2011

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@inproceedings{c8ae4794aeb54984a56a7db21658424d,

title = "Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers",

author = "Petr Vita and Doris Prieling and Helfried Steiner and Bernhard Gschaider and Markus Junk and Frank Holsteyns and Felix Staudegger and Christiane Lechner and Kuhlmann, {Hendrik C.}",

year = "2011",

language = "English",

isbn = "978-88-903724-5-2",

pages = "149--154",

booktitle = "MAS 2011 CD-ROM Proceedings",

}

TY - GEN

T1 - Simulations of Liquid Film Flows with Free Surface on Rotating Silicon Wafers

AU - Vita, Petr

AU - Prieling, Doris

AU - Steiner, Helfried

AU - Gschaider, Bernhard

AU - Junk, Markus

AU - Holsteyns, Frank

AU - Staudegger, Felix

AU - Lechner, Christiane

AU - Kuhlmann, Hendrik C.

PY - 2011

Y1 - 2011

M3 - Conference contribution

SN - 978-88-903724-5-2

SP - 149

EP - 154

BT - MAS 2011 CD-ROM Proceedings

ER -