Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

Taher Abu Ali; Julian Pilz; Philipp Schäffner; Markus Kratzer; Christian Teichert; Barbara Stadlober; Anna Maria Coclite

doi:10.1002/pssa.202000319

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

Taher Abu Ali, Julian Pilz, Philipp Schäffner, Markus Kratzer, Christian Teichert, Barbara Stadlober, Anna Maria Coclite

Lehrstuhl für Physik (460)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

4 Zitate (Scopus)

Originalsprache	Englisch
Aufsatznummer	2000319
Fachzeitschrift	Physica Status Solidi / A, Applications and Materials Science
Jahrgang	217
Ausgabenummer	21
DOIs	https://doi.org/10.1002/pssa.202000319
Publikationsstatus	Veröffentlicht - Nov. 2020

Zugriff auf Dokument

10.1002/pssa.202000319

Andere Dateien und Links

Link to publication in Scopus

Dieses zitieren

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title = "Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition",

keywords = "atomic layer deposition, piezoelectricity, thin films, zinc oxide",

author = "{Abu Ali}, Taher and Julian Pilz and Philipp Sch{\"a}ffner and Markus Kratzer and Christian Teichert and Barbara Stadlober and Coclite, {Anna Maria}",

year = "2020",

month = nov,

doi = "10.1002/pssa.202000319",

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T1 - Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

AU - Abu Ali, Taher

AU - Pilz, Julian

AU - Schäffner, Philipp

AU - Kratzer, Markus

AU - Teichert, Christian

AU - Stadlober, Barbara

AU - Coclite, Anna Maria

PY - 2020/11

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KW - atomic layer deposition

KW - piezoelectricity

KW - thin films

KW - zinc oxide

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DO - 10.1002/pssa.202000319

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VL - 217

JO - Physica Status Solidi / A, Applications and Materials Science

JF - Physica Status Solidi / A, Applications and Materials Science

IS - 21

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