Mechanical failure dependence on the electrical history of lead zirconate titanate thin films

Kathlin Coleman; Maximilian Ritter; Raul Bermejo; S. Trolier-McKinstry

doi:https://doi.org/10.1016/j.jeurceramsoc.2020.11.002

Mechanical failure dependence on the electrical history of lead zirconate titanate thin films

Titel in Übersetzung: nich verfügbar

Kathlin Coleman, Maximilian Ritter, Raul Bermejo, S. Trolier-McKinstry

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

Abstract

Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ ₀ ∼ 485 ± 30 MPa); this decreased for both poled samples (σ ₀ ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ ₀ ∼ 433 ± 30 MPa). in situ ε _r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.

Titel in Übersetzung	nich verfügbar
Originalsprache	Englisch
Seiten (von - bis)	2465-2471
Seitenumfang	7
Fachzeitschrift	Journal of the European Ceramic Society
Jahrgang	41
Ausgabenummer	4
DOIs	https://doi.org/10.1016/j.jeurceramsoc.2020.11.002
Publikationsstatus	Veröffentlicht - Apr. 2021

Bibliographische Notiz

Funding Information:
This manuscript is based on work supported by the National Science Foundation, as part of the Center for Dielectrics and Piezoelectrics under Grant Nos. IIP-1841453, and IIP-1841466. The authors would also like to acknowledge Trevor Clark at the Materials Characterization Lab at Penn State for taking the FIB images.

Funding Information:
This manuscript is based on work supported by the National Science Foundation , as part of the Center for Dielectrics and Piezoelectrics under Grant Nos. IIP-1841453 , and IIP-1841466 . The authors would also like to acknowledge Trevor Clark at the Materials Characterization Lab at Penn State for taking the FIB images.

Publisher Copyright:
© 2020 Elsevier Ltd

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title = "Mechanical failure dependence on the electrical history of lead zirconate titanate thin films",

abstract = "Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ 0 ∼ 433 ± 30 MPa). in situ ε r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance. ",

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AU - Trolier-McKinstry, S.

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N2 - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ 0 ∼ 433 ± 30 MPa). in situ ε r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.

AB - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ 0 ∼ 433 ± 30 MPa). in situ ε r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.

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KW - Fracture (c)

KW - Mechanical properties (c)

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KW - Piezoelectric properties (c)

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