Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

Markus Pohler; Robert Franz; Jürgen Ramm; C. Polzer; Christian Mitterer

Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

Titel in Übersetzung: Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets

Markus Pohler, Robert Franz, Jürgen Ramm, C. Polzer, Christian Mitterer

Lehrstuhl für Metallkunde (420)

Publikation: Konferenzbeitrag › Poster › Forschung › Begutachtung

Titel in Übersetzung	Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets
Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2010
Veranstaltung	11th European Vacuum Conference - Salamanca, Spanien Dauer: 20 Sept. 2010 → 24 Sept. 2010

Konferenz

Konferenz	11th European Vacuum Conference
Land/Gebiet	Spanien
Ort	Salamanca
Zeitraum	20/09/10 → 24/09/10

Dieses zitieren

@conference{c304ae4274ea437190c305acae55d94c,

title = "Investigation of macroparticles in arc evaporated (Al, Cr)2O3 coatings and the surface of the corresponding Al-Cr compound targets",

author = "Markus Pohler and Robert Franz and J{\"u}rgen Ramm and C. Polzer and Christian Mitterer",

year = "2010",

language = "English",

note = "11th European Vacuum Conference ; Conference date: 20-09-2010 Through 24-09-2010",

}