Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

B. Völker; W. Heinz; K. Matoy; R. Roth; J. M. Batke; T. Schöberl; C. Scheu; G. Dehm

doi:10.1080/14786435.2014.913108

Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

B. Völker, W. Heinz, K. Matoy, R. Roth, J. M. Batke, T. Schöberl, C. Scheu, G. Dehm

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

8 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	1967-1981
Seitenumfang	15
Fachzeitschrift	Philosophical magazine
Jahrgang	95
Ausgabenummer	16-18
DOIs	https://doi.org/10.1080/14786435.2014.913108
Publikationsstatus	Veröffentlicht - 23 Juni 2015

Zugriff auf Dokument

10.1080/14786435.2014.913108

Andere Dateien und Links

Link to publication in Scopus

Dieses zitieren

@article{01fdd3e40f904a938305452c761f934e,

title = "Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass",

keywords = "4-point bending, interface energy release rate, W(TI)/BPSG interface",

author = "B. V{\"o}lker and W. Heinz and K. Matoy and R. Roth and Batke, {J. M.} and T. Sch{\"o}berl and C. Scheu and G. Dehm",

year = "2015",

month = jun,

day = "23",

doi = "10.1080/14786435.2014.913108",

language = "English",

volume = "95",

pages = "1967--1981",

journal = "Philosophical magazine",

issn = "1478-6435",

publisher = "Taylor and Francis",

number = "16-18",

}

TY - JOUR

T1 - Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

AU - Völker, B.

AU - Heinz, W.

AU - Matoy, K.

AU - Roth, R.

AU - Batke, J. M.

AU - Schöberl, T.

AU - Scheu, C.

AU - Dehm, G.

PY - 2015/6/23

Y1 - 2015/6/23

KW - 4-point bending

KW - interface energy release rate

KW - W(TI)/BPSG interface

UR - http://www.scopus.com/inward/record.url?scp=84932200010&partnerID=8YFLogxK

U2 - 10.1080/14786435.2014.913108

DO - 10.1080/14786435.2014.913108

M3 - Article

AN - SCOPUS:84932200010

SN - 1478-6435

VL - 95

SP - 1967

EP - 1981

JO - Philosophical magazine

JF - Philosophical magazine

IS - 16-18

ER -