Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

Christian Saringer, Christoph Oberroither, Katrin Zorn, Robert Franz, Christian Mitterer

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

2 Zitate (Scopus)

Originalsprache	Englisch
Fachzeitschrift	Journal of vacuum science & technology / A (JVST)
Jahrgang	36
Ausgabenummer	2
DOIs	https://doi.org/10.1116/1.5001141
Publikationsstatus	Veröffentlicht - 2018

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title = "Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings",

author = "Christian Saringer and Christoph Oberroither and Katrin Zorn and Robert Franz and Christian Mitterer",

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T1 - Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

AU - Saringer, Christian

AU - Oberroither, Christoph

AU - Zorn, Katrin

AU - Franz, Robert

AU - Mitterer, Christian

PY - 2018

Y1 - 2018

U2 - 10.1116/1.5001141

DO - 10.1116/1.5001141

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JO - Journal of vacuum science & technology / A (JVST)

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