High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

M. Jilek, Jr.; M. Jilek,; Francisca Mendez Martin; P.H. Mayrhofer; S. Veprek

doi:10.1016/j.tsf.2014.01.059

High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

Titel in Übersetzung: High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

M. Jilek, Jr., M. Jilek,, Francisca Mendez Martin, P.H. Mayrhofer, S. Veprek

Lehrstuhl für Metallkunde (420)

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

17 Zitate (Scopus)

Titel in Übersetzung	High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering
Originalsprache	Englisch
Seiten (von - bis)	361-368
Fachzeitschrift	Thin solid films
Jahrgang	556
DOIs	https://doi.org/10.1016/j.tsf.2014.01.059
Publikationsstatus	Veröffentlicht - 2014

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10.1016/j.tsf.2014.01.059

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title = "High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering",

author = "{Jilek, Jr.}, M. and M. Jilek, and {Mendez Martin}, Francisca and P.H. Mayrhofer and S. Veprek",

year = "2014",

doi = "10.1016/j.tsf.2014.01.059",

language = "English",

volume = "556",

pages = "361--368",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - High-rate deposition of AlTiN and related coatings with dense morphology by central cylindrical direct current magnetron sputtering

AU - Jilek, Jr., M.

AU - Jilek,, M.

AU - Mendez Martin, Francisca

AU - Mayrhofer, P.H.

AU - Veprek, S.

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.01.059

DO - 10.1016/j.tsf.2014.01.059

M3 - Article

SN - 0040-6090

VL - 556

SP - 361

EP - 368

JO - Thin solid films

JF - Thin solid films

ER -