Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure

Nina Schalk, Christian Saringer, Alexander Fian, Velislava Terziyska, J. Julin, Michael Tkadletz

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	1-7
Fachzeitschrift	Surface & coatings technology
Jahrgang	2021
Ausgabenummer	418
DOIs	https://doi.org/10.1016/j.surfcoat.2021.127237
Publikationsstatus	Veröffentlicht - 2021

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title = "Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure",

author = "Nina Schalk and Christian Saringer and Alexander Fian and Velislava Terziyska and J. Julin and Michael Tkadletz",

year = "2021",

doi = "10.1016/j.surfcoat.2021.127237",

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journal = "Surface & coatings technology",

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TY - JOUR

T1 - Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure

AU - Schalk, Nina

AU - Saringer, Christian

AU - Fian, Alexander

AU - Terziyska, Velislava

AU - Julin, J.

AU - Tkadletz, Michael

PY - 2021

Y1 - 2021

U2 - 10.1016/j.surfcoat.2021.127237

DO - 10.1016/j.surfcoat.2021.127237

M3 - Article

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VL - 2021

SP - 1

EP - 7

JO - Surface & coatings technology

JF - Surface & coatings technology

IS - 418

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