Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher; Francisca Mendez Martin; Bernhard  Sartory; Livia Chitu; Jun Lu; Nina Schalk; Jozef Keckes; Lars Hultman; Christian Mitterer

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher, Francisca Mendez Martin, Bernhard Sartory, Livia Chitu, Jun Lu, Nina Schalk, Jozef Keckes, Lars Hultman, Christian Mitterer

Publikation: Konferenzbeitrag › Vortrag › Forschung › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2015
Veranstaltung	42nd International Conference on Metallurgical Coatings and Thin Films - San Diego, USA / Vereinigte Staaten Dauer: 20 Apr. 2015 → 24 Apr. 2015 https://www2.avs.org/conferences/icmctf/

Konferenz

Konferenz	42nd International Conference on Metallurgical Coatings and Thin Films
Land/Gebiet	USA / Vereinigte Staaten
Ort	San Diego
Zeitraum	20/04/15 → 24/04/15
Internetadresse	https://www2.avs.org/conferences/icmctf/

42nd International Conference on Metallurgical Coatings and Thin Films
Marlene Mühlbacher (Redner/-in)
24 Apr. 2015
Aktivität: Teilnahme an oder Organisation einer Veranstaltung › Konferenzteilnahme

Dieses zitieren

Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L., & Mitterer, C. (2015). Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, USA / Vereinigte Staaten.

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title = "Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography",

author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and Bernhard Sartory and Livia Chitu and Jun Lu and Nina Schalk and Jozef Keckes and Lars Hultman and Christian Mitterer",

year = "2015",

language = "English",

note = "42nd International Conference on Metallurgical Coatings and Thin Films ; Conference date: 20-04-2015 Through 24-04-2015",

url = "https://www2.avs.org/conferences/icmctf/",

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Mühlbacher, M, Mendez Martin, F, Sartory, B, Chitu, L, Lu, J, Schalk, N , Keckes, J, Hultman, L & Mitterer, C 2015, 'Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography', 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, USA / Vereinigte Staaten, 20/04/15 - 24/04/15.

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, Bernhard et al.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, USA / Vereinigte Staaten.

Publikation: Konferenzbeitrag › Vortrag › Forschung › Begutachtung

TY - CONF

T1 - Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, Bernhard

AU - Chitu, Livia

AU - Lu, Jun

AU - Schalk, Nina

AU - Keckes, Jozef

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

M3 - Presentation

T2 - 42nd International Conference on Metallurgical Coatings and Thin Films

Y2 - 20 April 2015 through 24 April 2015

ER -

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Konferenz

Aktivitäten

42nd International Conference on Metallurgical Coatings and Thin Films

Dieses zitieren