Correlating structural and mechanical properties of AlN / TiN superlattice films

Nikola Koutná, Petr Rehák, Zhuo Chen, Matthias Bartosik, Markus Fallmann, Miroslav Cerny, Zhaoli Zhang, Martin Friák, Mojmír Šob, Paul Heinz Mayrhofer, David Holec

Publikation: Beitrag in FachzeitschriftArtikelForschungBegutachtung

17 Zitate (Scopus)

Abstract

Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.

OriginalspracheEnglisch
Seiten (von - bis)159-163
Seitenumfang5
FachzeitschriftScripta materialia
Jahrgang165.2019
AusgabenummerMay
DOIs
PublikationsstatusVeröffentlicht - 1 Mai 2019

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